A highly sensitive and specific copper ion sensor using single crystalline silicon nanowires (SiNWs) configured as field-effect transistors (FETs) is reported. The surface of SiNWs is functionalized with a His-containing tripeptide which serves as a copper sensitive layer. It is found that the complexation between copper ions and His-containing tripeptides leads to an increase in the SiNW conductance, and the position of His residue in the tripeptide plays an important role for the binding of copper ions. Only Gly-Gly-His-modified SiNWs exhibit selectivity for copper ions in the presence of zinc ions whereas Gly-His-Gly-modified SiNWs do not. Our experimental results demonstrate the potential utility of oligopeptide-modified SiNWs as metal ion sensors. © 2008 Elsevier B.V. All rights reserved.