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Symmetric toggle switch - A new type of rf MEMS switch for telecommunication applications: Design and fabrication
, B. Margesin, L. Lorenzelli, F. Giacomozzi, C. Collini, M. Zen, G. Soncini, L. Del Tin, R. Gaddi
Published in
Volume: 123-124
Pages: 505 - 514
In this paper, we present a new type of rf MEMS switch with low actuation voltage and high isolation, for high rf power and reliability applications in telecommunication. 'Symmetric toggle switch' (STS) is based on push-pull mechanism and utilizes torsion springs and levers, placed symmetrically and transverse to CPW line. The switches designed for 8-14 GHz applications have analytically calculated and FEM simulated actuation voltages in the range of 8-10 V. The simulated insertion loss and isolation for the devices are 0.25 and 35 dB, respectively, at 10 GHz. The fabrication process and preliminary experimental results are also presented. © 2005 Elsevier B.V. All rights reserved.
About the journal
JournalSensors and Actuators, A: Physical