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Static and DC dynamic pull-in analysis of curled microcantilevers with a compliant support
, R.K. Godara, M.M. Joglekar
Published in Springer Verlag
Volume: 25
Issue: 3
Pages: 965 - 975
In the present work, we propose an analytical model for the static and DC dynamic pull-in analysis of electrostatically actuated, initially curled microcantilever beams. The analytical model of the initially deformed microcantilever beam incorporates the effects of flexible boundary conditions, fringing fields, and full-order electrostatic nonlinearity. The problem is formulated based on the Euler–Bernoulli theory with slender beams. The pull-in parameters are extracted by incorporating a single mode in the setting of the Galerkin based reduced order model. The effect of the flexible support on the natural frequencies and mode shapes is presented. The parabolic and linear configurations of initial deformation of the beam are assumed for analysis. The accuracy of the present model for static pull-in is verified with the previously reported experimental results. An excellent agreement of the present results with experimental results from the literature indicates the sufficient accuracy of the present model. © 2018, Springer-Verlag GmbH Germany, part of Springer Nature.
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