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Silicon Nanowire array bio-sensor using top-down CMOS technology
, I.K. Lao, K. Buddharaju, N. Singh, N. Balasubramanian, D.L. Kwong
Published in
Pages: 1051 - 1054
The paper elaborates the Silicon Nanowire arrays fabrication using standard CMOS compatible technologies (top-down) with each array consisting of 100 wires, which are individually electrically measurable for their conductance and facilitating statistical analysis. The arrays are integrated with micro-fluidics for the delivery of various chemicals for surface modification, buffer solutions, biomolecules/ analytes, etc. Biotinylated-ssDNA is detected electrically, label-free by the nanowire sensors modified by streptavidin; further DNA hybridization is also observed similarly on sensors modified by complementary DNA probes. Our approach paves way for realizing high-density, highly sensitive biological and chemical sensors using mass fabrication technologies and thus has the potential to achieve multiplexed detection which is essential for understanding and curing of complex diseases. ©2007 IEEE.
About the journal
JournalTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems