This paper presents an application of SEM-Voltage Contrast for the estimation of parasitic capacitances and leakage impedances in a failed circuit. The measurements were performed on a thick film hybrid resistor, as a case study, which fractured due to excessive current flow and where the nodes are accessible only through electron beam. An analytical expression relating the parasitic parameters to be measured is derived. The experimental and simulated results match within 10% of the experimental observations. © 1990.