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Self-sealed circular channels for micro-fluidics
, N. Ranganathan, W.-L. Ong, K.C. Tang, L. Yobas
Published in
Volume: 142
Issue: 1
Pages: 80 - 87
The paper elaborates a technique to realize fully circular self-sealed channels with diameter varying from few micrometers to less than 100 nm using standard silicon processes like trench formation, doped silicon oxide filling and thermal cycle for its re-flow. The integration of the channels with the fluidic reservoirs, their packaging with input and output ports for fluids and external electrodes is also presented. Such a chip is used as lateral patch clamp to record the electrical activity of the cells. © 2007 Elsevier B.V. All rights reserved.
About the journal
JournalSensors and Actuators, A: Physical