This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are highlighted, as they have significant contributions to the performance of MEMS devices. The challenges and statues of the test structures are outlined and discussed. © 2011 SumDU.

Kamaljit Rangra

Department of Electrical Engineering

IIT Jodhpur

A. Sharma

M. Kaur

D. Bansal

D. Kumar

&ldquo;IIT Jodhpur is committed to impart quality education to facilitate the creation of qualified, competent and responsible human resources to meet the emerging technological challenges of the world. It is working towards creating an equitable learning platform that is positive, accessible and effective in the face of the modern societal and scientific advancements.

Flexibility in curriculum, in all its academic programs, encompassing elements of teaching, research, creativity, innovation and entrepreneurship is the most unique feature of IIT Jodhpur. The Department of Science and Technology (DST), under the National Mission on Cyber Physical Systems, has identified IIT Jodhpur as a Technology &amp; Innovation Hub in the area of Augmented Reality and Virtual Reality. The institute has also been nominated as the coordinator for the Jodhpur City and Knowledge Cluster by the Office of Principal Scientific Adviser, Government of India.

The sprawling 852-acre IIT Jodhpur campus is a majestic tribute to the deep-rooted diverse cultural heritage of the region. The campus is an architectural masterpiece, which is slated to become an international exemplar of sustainability with net-zero energy, and advanced water and waste management strategies.&rdquo;

Journal	Journal of Nano- and Electronic Physics
ISSN	20776772