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Review of mems test structures for mechanical parameter extraction
A. Sharma, M. Kaur, D. Bansal, D. Kumar,
Published in
Volume: 3
Issue: 1 PART2
Pages: 243 - 253
This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are highlighted, as they have significant contributions to the performance of MEMS devices. The challenges and statues of the test structures are outlined and discussed. © 2011 SumDU.
About the journal
JournalJournal of Nano- and Electronic Physics