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Pristine ZnO and SnO2 films for sensing of volatile organic compounds
R. Prajesh, V. Goyal, J. Bhargava, A. Sharma,
Published in Springer Verlag
Volume: 23
Issue: 8
Pages: 3027 - 3031
Volatile organic compounds can cause severe health problems if inhaled in concentrations more than the permissible threshold. This paper presents the experimental sensing study of three different volatile organic compounds (VOCs) viz. ethanol (C2H5OH), propanol (C3H7OH) and benzene (C6H6). Sensing experiments are performed on undoped, reactively sputtered films (ZnO/SnO2) integrated with micro-heater and interdigitated electrodes. Process integration is carried out using standard MEMS unit processes. A comprehensive experimental study is carried out to analyze the operating temperature and sensing behavior of the above mentioned volatile organic compounds on SnO2 and ZnO sensing films. The operating temperature is optimized for maximum sensitivity. Fast response (<40 s) and recovery times (<55 s) are achieved and sensor response for VOCs (C2H5OH, C3H7OH and C6H6) concentrations as low as 25 PPM is recorded. © 2016, Springer-Verlag Berlin Heidelberg.
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