This paper presents fabrication of thermally actuated multi-layered micro actuator for out of plane actuation application. Multi-layered actuators are fabricated using ammonium per sulphate based TMAH etching with metal passivation. Multi-layered Au Si3N4SiO2 micro actuators with straight and cross-heaters are characterized using I-V and LDV measurements. Gold as upper layer of micro actuator is fully protected during the release process. Fundamental mode or resonant frequency of fabricated multi-layered micro actuator is measured by Laser Doppler Vibrometer which is observed around 20 KHz. © 2018 IEEE.

Ajay Agrawal

Department of Electrical Engineering

IIT Jodhpur

V. Maharshi

V. Mere

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Flexibility in curriculum, in all its academic programs, encompassing elements of teaching, research, creativity, innovation and entrepreneurship is the most unique feature of IIT Jodhpur. The Department of Science and Technology (DST), under the National Mission on Cyber Physical Systems, has identified IIT Jodhpur as a Technology &amp; Innovation Hub in the area of Augmented Reality and Virtual Reality. The institute has also been nominated as the coordinator for the Jodhpur City and Knowledge Cluster by the Office of Principal Scientific Adviser, Government of India.

The sprawling 852-acre IIT Jodhpur campus is a majestic tribute to the deep-rooted diverse cultural heritage of the region. The campus is an architectural masterpiece, which is slated to become an international exemplar of sustainability with net-zero energy, and advanced water and waste management strategies.&rdquo;

Journal	Data powered by SciSpaceProceedings of International Conference on 2018 IEEE Electron Device Kolkata Conference, EDKCON 2018
Publisher	Data powered by SciSpaceInstitute of Electrical and Electronics Engineers Inc.