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Multi-layered [Au/Si3N4/SiO2] thermal actuator realization using metal passivated TMAH micro-machining
V. Maharshi, V. Mere,
Published in IOP Publishing Ltd
Volume: 1
Issue: 1
This paper presents the design and fabrication of thermally actuated multi-layered microactuator for out of plane actuation application. Multi-layered actuators are fabricated using ammonium persulfate basedTMAH(Tetra-Methyl-Ammonium-Hydroxide) etching with metal passivation. Multi-layered [Au/Si3N4/SiO2] microactuators with straight and cross-heaters are characterized using the I-V measurement tool. Temperature across actuator was similar to simulated results. Gold as an upper layer of a microactuator fully protected during the release process. Fundamental mode or resonant frequency of fabricated multi-layered microactuator measured by laser Doppler vibrometer (LDV) which observed around 20 KHz. ©2019 IOP Publishing Ltd.
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