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Modeling of Electrothermal Microactuator
V. Maharshi, V. Mere,
Published in Springer
Volume: 342
Pages: 107 - 115
This paper presents the modeling of electrothermally actuated bimorph actuator for out-of-plane actuation application. Al-Si bimorph was optimized for higher displacement applications. Temperature distribution analysis of the Al-Si bimorph combination was chosen due to their larger displacement range. The modeling of Al-Si was performed with FEM and analytical analysis. Temperature distribution across the bimorph actuator with respect to length and applied voltage was optimized using FEM, lumped, and analytical analysis. The maximum temperature across Al-Si bimorph was achieved around 106 °C without convection and 85 °C with convection. © 2021, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
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JournalData powered by TypesetSpringer Proceedings in Mathematics and Statistics
PublisherData powered by TypesetSpringer