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MEMS Integrated MoO 3 nanostructures based acetone sensor
P. Dwivedi, Anuroop, S. Das,
Published in IEEE Computer Society
Volume: 2018-December
Pages: 17 - 19
This paper presents selective acetone detection using MoO 3 (molybdenum trioxide) as a sensing layer. The nanostructures were synthesized using seedless and wafer scale synthesis process. The developed synthesis process is scalable and compatible with IC technology. In order to enhance the sensitivity of the sensor, an on chip Ni (nickel) heater configuration was fabricated for heating the sensor platform. In order to reduce the power consumption, a diaphragm was created using standard Reactive Ion Etching (RIE). © 2018 IEEE.
About the journal
JournalData powered by TypesetProceedings of the International Conference on Sensing Technology, ICST
PublisherData powered by TypesetIEEE Computer Society