Header menu link for other important links
Mathematical modeling of different diaphragm geometries in MEMS pressure sensor
Published in Elsevier Ltd
Volume: 44
Issue: 1, SI
Pages: 1243 - 1248
Micro pressure sensors generally employ diaphragm as the sensing element which converts the applied pressure into appropriate displacement. The displacement can be further used for sensing the actual physical phenomena viz., pressure or force with different transduction techniques. The transduction mechanism could be piezoresistive, capacitive, piezoelectric or resonant, etc. It is utmost essential to comprehend the behaviour of the structural element before its design with respect to transduction technique. The parameter optimization of diaphragm is the prime challenge in order to achieve the unsurpassed performance of the device. In this work, three of the diaphragm geometries namely a square diaphragm, a rectangular diaphragm and a circular diaphragm are considered for structural analysis. The displacement and stress analysis of the structures are carried out and investigated with the help of finite element-based simulation. The performed analysis will be useful in the selection of pressure sensor which provides optimized sensor geometry for required sensitivity, linearity, output range and area. © 2021 Elsevier Ltd. All rights reserved.
About the journal
JournalData powered by TypesetMaterials Today: Proceedings
PublisherData powered by TypesetElsevier Ltd
Open AccessNo