Lowering the processing temperature is a crucial factor in the development of flexible electronic devices. Here we report the fabrication of high-performance OFETs based on room temperature deposited Ba0.5Sr0.5TiO3 (BST) as a high-k dielectric layer. The fabricated devices exhibited excellent performance while operating at a low voltage of -3 V along with demonstrating high operational stability when tested for 1 h bias stress and continuous transfer measurement cycles. In addition, inverter circuit performance is also investigated with these devices by connecting them to external loads. © 2021 IEEE.