Header menu link for other important links
Integrated CMOS-compatible silicon nanowire sensor with efficient sample delivery
I.K. Lao, , H.H. Feng, N. Balasubramanian, D.L. Kwong
Published in Japan Academic Association Inc
Pages: 1208 - 1210
A CMOS-compatible silicon nanowire (SiNW) sensor developed by self-limiting oxidation process is integrated with a micro channel for high sample delivery efficiency through either direct lining or hydrodynamic focusing. pH sensing result of the integrated sensor is reported. © 2006 Society for Chemistry and Micro-Nano Systems.
About the journal
JournalMicro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherJapan Academic Association Inc