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Integrated CMOS-compatible silicon nanowire sensor with efficient sample delivery
I.K. Lao
,
Ajay Agrawal
,
H.H. Feng
,
N. Balasubramanian
,
D.L. Kwong
Published in Japan Academic Association Inc
2006
Pages: 1208 - 1210
Abstract
A CMOS-compatible silicon nanowire (SiNW) sensor developed by self-limiting oxidation process is integrated with a micro channel for high sample delivery efficiency through either direct lining or hydrodynamic focusing. pH sensing result of the integrated sensor is reported. © 2006 Society for Chemistry and Micro-Nano Systems.
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Journal Details
Authors (1)
About the journal
Journal
Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Publisher
Japan Academic Association Inc
Authors (1)
Ajay Agrawal
Department of Electrical Engineering
IIT Jodhpur
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