Profiles
Research Units
Publications
Sign Up
Faculty Login
X
Other
Errata: Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication
A. Kumar
,
Ankur Gupta
,
R. Kant
,
A. Syed Nadeem
,
N. Tiwari
,
J. Ramkumar
,
S. Bhattacharya
Published in SPIE
2014
DOI:
10.1117/1.JMM.13.1.019801
Volume: 13
Issue: 1
Download
PDF
Publisher Copy
Cite
Publisher Copy Version
Content may be subject to copyright,
Check License
PDF
Journal Details
Authors (1)
About the journal
Journal
Data powered by Typeset
Journal of Micro/Nanolithography, MEMS, and MOEMS
Publisher
Data powered by Typeset
SPIE
ISSN
19325150
Authors (1)
Ankur Gupta
Department of Mechanical Engineering
IIT Jodhpur
Recent publications
Carbon Nanostructures for Energy and Sensing Applications
A review on optimization of machining performances and recent developments in electro discharge machining
Superhydrophobic polymethylsilsesquioxane pinned one dimensional ZnO nanostructures for water remediation through photo-catalysis
Studies on CO2 Laser Micromachining on PMMA to Fabricate Micro Channel for Microfluidic Applications
Get all the updates for this publication
Follow