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Errata: Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication
A. Kumar
,
Ankur Gupta
,
R. Kant
,
A. Syed Nadeem
,
N. Tiwari
,
J. Ramkumar
,
S. Bhattacharya
Published in SPIE
2014
DOI:
10.1117/1.JMM.13.1.019801
Volume: 13
Issue: 1
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Journal of Micro/Nanolithography, MEMS, and MOEMS
Publisher
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SPIE
ISSN
19325150
Authors (1)
Ankur Gupta
Department of Mechanical Engineering
IIT Jodhpur
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