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Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation
P. Joshi, N. Singhal, M. Santosh, A. Bandyopadhyay, S. Paliwal, R. Mukhiya,
Published in Institute of Electrical and Electronics Engineers Inc.
A MEMS capacitive sensor is emulated on a PCB for quick validation of CMOS interface circuit. In capacitive sensor, capacitance changes with external force; to mimic similar changes, controlled magnetic field is applied on emulated PCB capacitor. The dimension optimizations of interdigital capacitor are performed using CST software. The simulated values are milled on a FR4 sheet to make PCB capacitor. The simulated capacitance values are cross checked by making measurement using LCR meter on PCB capacitor and have a deviation of 6.5%. The complete MEMS emulator consists of PCB capacitor, permanent magnet controlled by screw gauge and gauss meter. A minimum change of 50 aF achieved over a base capacitance 1.9 pF. © 2020 IEEE.