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Design of MEMS based Film Bulk Acoustic Wave Resonator
R. Patel, V. Kumar Agrawal, D. Boolchandani,
Published in Elsevier Ltd
Volume: 4
Issue: 9
Pages: 10377 - 10382
MEMS based Film Bulk Acoustic Resonator (FBAR) is widelyused as a sensor for biochemical, physical sensing or as a filter. Device architectures available presently require the use of an air cavity, a freestanding membrane or Bragg mirror reflector and are fabricated as distinct components. Proposed FBAR uses polymer (polyimide) as a support layer to achieve Acoustic wave confinement. When the polyimide thickness is larger than a critical value, tpolyimide, performance of the proposed FBAR is analogous to devices using other architectures. The support layer made of polyimide makes the underlying substrate of FBAR insensitive to the acoustic wave. Al/ZnO/Al/Polyimide/Si taken as a different layer of FBAR when tpolyimide is 9 μm, operates at 1.3931 GHz and has a Q-factor of 1.8∗1028. © 2017 Elsevier Ltd.
About the journal
JournalData powered by TypesetMaterials Today: Proceedings
PublisherData powered by TypesetElsevier Ltd