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Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
D. Bansal, A. Kumar, A. Sharma,
Published in Springer Verlag
Volume: 21
Issue: 5
Pages: 1047 - 1052
This paper presents a new single pole double throw (SPDT) RF MEMS switch design based on a torsional series capacitive switch. The torsional configuration and use of floating metal reduce the stiction probabilities. Use of a single series capacitive switch compared to the conventional approach of a capacitive and series combination, offers compact size, higher bandwidth and superior reliability. The optimized SPDT topology offers a wider bandwidth of 17 GHz (3–20 GHz) with insertion loss of −0.3 to −0.4 dB and isolation −20 to −44 dB. The proposed structure actuates at 9 V and the contact force varies in the elastic contact regime from 20 to 68 µN for the bias voltage of 10–15 V. © 2014, Springer-Verlag Berlin Heidelberg.
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