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Design and simulation of two port RF MEMS resonators
G.M. Sundaram, M. Angira,
Published in
This paper presents detail analysis of MEMS Fixed Fixed beam resonator. Force voltage analogy is being used here for calculating electrical two port equivalent circuit and its component values. Its resonance frequency tuning behavior analyzed by varying dc bias voltages ranging from 0 V to 10 V. The resonant frequency variation with varying elctode air gap is also prediticted. © 2012 IEEE.
About the journal
Journal2012 International Conference on Computer Communication and Informatics, ICCCI 2012