This paper presents detail analysis of MEMS Fixed Fixed beam resonator. Force voltage analogy is being used here for calculating electrical two port equivalent circuit and its component values. Its resonance frequency tuning behavior analyzed by varying dc bias voltages ranging from 0 V to 10 V. The resonant frequency variation with varying elctode air gap is also prediticted. © 2012 IEEE.

Kamaljit Rangra

Department of Electrical Engineering

IIT Jodhpur

G.M. Sundaram

M. Angira

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