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Design and fabrication of a reduced stiction radio frequency MEMS switch
D. Bansal, A. Bajpai, P. Kumar, A. Kumar, M. Kaur,
Published in SPIE
Volume: 14
Issue: 3
The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46 μs. Use of a floating metal layer and optimal contact area ensures reduced stiction and smaller capacitive leakage. Overall size of the switch is 0.535 (0.50×1.070) mm2. Reduction in up-state capacitance also results in improvement in self-actuation voltage, insertion, and return loss. The optimized topology has improved the stiction and power handling of the switch. © 2015 Society of Photo-Optical Instrumentation Engineers (SPIE).
About the journal
JournalData powered by TypesetJournal of Micro/ Nanolithography, MEMS, and MOEMS
PublisherData powered by TypesetSPIE