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Contact area design of ohmic RF MEMS switch for enhanced power handling
Anuroop, D. Bansal, Khushbu, P. Kumar, A. Kumar,
Published in IEEE Computer Society
Volume: 2018-December
Pages: 91 - 95
RF MEMS switches are small in size, consume low power and have good RF response. However, the field deployment of RF MEMS switches is restricted due to limited power handling capability and reliability issues. In literature, power handling is improved through contact area either by adding hard materials or increasing the thickness. In the present paper, calculations for contact area versus stiction forces are performed and RF MEMS ohmic switch with optimal contact area is proposed and fabricated. The power handling of RF MEMS switch is increased by 55.86% without the addition of new material or processing steps. Insertion loss and return loss of the switch are also improved using corner compensation. © 2018 IEEE.
About the journal
JournalData powered by TypesetProceedings of the International Conference on Sensing Technology, ICST
PublisherData powered by TypesetIEEE Computer Society