Cavitation behavior during high temperature deformation of superplastic materials is reviewed. On the basis of cavitation, superplastic materials fall into two classes. In one, maximum cavitation occurs under the condition of optimum superplasticity. In another, cavitation is negligible under the condition of optimum superplasticity but significant cavitation occurs under other conditions. Often, grain boundary precipitates and second phases present provide the cavity nucleation sites. Because of the fine grain size, predominance of grain boundary sliding and high value of strain rate sensitivity, superplastic cavitation process has many important differences from creep cavitation. It is, therefore, important to identify those factors and understand the mechanisms which lead to superplastic cavitation and failure.