Grain growth, cavitation and flow stress data, which are available together for limited materials during superplastic deformation, were collected and analyzed to explore the interdependence in microstructural changes and its impact on flow properties. The grain size (dg) varies with strain (ε) as dg ∝ εc, c being strain exponent, whereas cavity volume (Cv) follows Cv = Aε2 + Bgε + C type polynomial relationship, where A, B and C are coefficients. The interrelationship between Cv and dg can be expressed by: Cv ∝ exp(dg). While flow hardening is attributed to grain growth in the early part of deformation, the occurrence of cavitation is found to cause flow softening at later stage of deformation.