A novel design technique for broadband substrate integrated waveguide cavity-backed slot antenna is demonstrated in this letter. Instead of using a conventional narrow rectangular slot, a bow-tie-shaped slot is implemented to get broader bandwidth performance. The modification of the slot shape helps to induce strong loading effect in the cavity and generates two closely spaced hybrid modes that help to get a broadband response. The slot antenna incorporates thin cavity backing (height < 0.03λ 0) in a single substrate and thus retains low-profile planar configuration while showing unidirectional radiation characteristics with moderate gain. A fabricated prototype is also presented that shows a bandwidth of 1.03 GHz (9.4%), a gain of 3.7 dBi over the bandwidth, 15 dB front-to-back ratio, and cross-polarization level below-18 dB. © 2014 IEEE.