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Analytical Modeling, Simulation, and Fabrication of a MEMS Rectangular Paddle Piezo-Resistive Micro-Cantilever-Based Wind Speed Sensor
V.K. Agrawal, R. Patel, D. Boolchandani,
Published in Institute of Electrical and Electronics Engineers Inc.
Volume: 18
Issue: 18
Pages: 7392 - 7395
In this paper, fabrication of a rectangular paddle micro-cantilever-based wind speed sensor along with its analytical model has been presented. The analytical model uses the closed-form solution to the bending stress caused by static deflection. Simulations of the device were done using finite-element analysis. The simulation, analytical, and experimental results have been compared for a better insight into the sensor behavior. Piezo-resistive deflection detection mechanism has been utilized to measure the wind speed. The experimental results show that the fabricated sensor can detect wind speed up to 29 ms-1 and has a sensitivity of 0.071 mV/ms-1 - V. © 2018 IEEE.
About the journal
JournalData powered by TypesetIEEE Sensors Journal
PublisherData powered by TypesetInstitute of Electrical and Electronics Engineers Inc.