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A large stroke inverse series connected electrothermal bimorph micromirror platform for optical applications
A. Kumar, D. Bansal, M. Kaur,
Published in Springer Science and Business Media, LLC
Volume: 215
Pages: 889 - 895
This paper presents a large stroke surface micromachined micromirror platform actuated using inverse-series-connected (ISC) bimorph actuator. The proposed structure is designed using four symmetric ICS bimorph actuator made up of Aluminum and Silicon Dioxide and a micromirror plate of sandwiched layer of SiO2 and Aluminum The platform is capable of producing both piston and tip-tilt motion by application of voltage to Aluminum layer which acts as a constituent layer of ICS bimorph and an electrical heater simultaneously. With a mirror plate size of 500 X 500 µm2, the maximum displacement is 100 µm in piston mode and 69 µm in tip-tilt mode at 0.2 V. The micromirror is capable of scanning with resonance frequencies at 4.31 and 6.70 kHz in piston and torsional mode respectively. © Springer Nature Switzerland AG 2019.
About the journal
JournalData powered by TypesetSpringer Proceedings in Physics
PublisherData powered by TypesetSpringer Science and Business Media, LLC